ITO conductive film glass, i.e. indium tin oxide transparent conductive film glass, is a high-tech product obtained by sputtering indium tin oxide conductive film coating on ultra-thin glass and annealing at high temperature in a highly purified workshop environment by using planar magnetron technology through ITO conductive film glass production line.
Products are widely used in liquid crystal display (LCD), solar cell, microelectronics ITO conductive film glass, optoelectronics and various optical fields.
The main parameters of ITO conductive film are: surface resistance, uniformity of surface resistance, transmittance, thermal stability, heating shrinkage, heating crimp, etc. The light transmittance is mainly related to the substrate material and the surface resistance of ITO film. Under the same substrate material, the smaller the surface resistance of ITO film, the greater the thickness of ITO film, and the corresponding reduction of light transmittance.
In the transparent conductive oxide film TCO, the In2O3 (ITO) film doped with Sn has the highest transmittance and the best conductivity, and it is easy to etch fine patterns in the acid solution, of which the transmittance is more than 90%. The transmittance and resistance of ITO are controlled by the ratio of In2O3 to SnO2, usually SnO2: In2O3 = 1:9
There are many methods for the preparation of ITO thin films, which can be divided into two main categories: physical and chemical methods. Physical methods include magnetron sputtering, vacuum evaporation, ion enhanced deposition and laser pulse deposition. Chemical methods include thermal spray, chemical vapor deposition, sol-gel method and so on.
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